M.V. Balakhanov Al’manac of Modern Metrology № 2 (14) 2018, pages 122–149 The issues of ensuring the uniformity of measurements of both common and special parameters of clean rooms and process environments are considered. Use at delivery and acceptance of production of the measuring instruments traced to the State primary standards will be able to provide … Continue reading On the traceability of measurements of parameters of clean rooms and associated controlled environments to the state primary standards